Optical Waveguide for On-Chip Interconnect
Laser & Optoelectronics Progress（2006）
Abstract
The waveguides(poly Si/SiO_2,Si/SiO_2,Si_3N_4/SiO_2)for on-chip optical interconnect have been analyzed in detail,including the basic conditions,fabrication method and loss mechanism.The recent progress is summarized.
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Key words
optical waveguide,on-chip
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