1404 CAICISSを用いた分子潤滑膜の被覆率測定法に対する分子動力学法による検証(口頭講演,トピックスセッション:磁気ヘッド浮上すきま低減技術(1))

To evaluate the coverage of thin lubricant films on magnetic recording media, a new method using CAICISS (Coaxial Impact Collision Ion Scattering Spectroscopy) was proposed. In this study, we reproduced the molecularly thin lubricant films on the carbon overcoat by molecular dynamics simulation, and calculated the coverage and fluorine-to-carbon atomic ratio (F/C ratio) assuming the CAICISS measurements. From the simulation results, we confirmed that the coverage measurement method using CAICISS can evaluate the accurate coverage of molecularly thin lubricant films.