Analysis of RF MEMS capacitive switches by using switch EM ANN models

Artificial neural networks (ANNs) have appeared to be an alternative to the conventional models of RF MEMS switches. In this paper, neural models of an RF MEMS capacitive switch are developed and used for the electrical design of the switch. Namely, an ANN model relating the switch resonant frequency and the bridge dimensions is used to analyze efficiently the switch behavior with changes of bridge dimensions. Furthermore, it is illustrated how the developed model can be used for the determination of bridge dimensions in order to achieve the desired switch resonant frequency. In addition, application of a switch inverse ANN model for the determination of bridge dimensions is analyzed as well.