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金属有機化学蒸着システムにおける反射率マッピングによるSi(111)基板上に成長させたGaNのその場ウエハ湾曲測定【Powered by NICT】

Yang Yi-Bin,Liu Ming-Gang,Chen Wei-Jie,Han Xiao-Biao,Chen Jie,Lin Xiu-Qi,Lin Jia-Li,Luo Hui,Liao Qiang,Zang Wen-Jie,Chen Yin-Song,Qiu Yun-Ling,Wu Zhisheng,Liu Yang,Zhang Baijun

Chinese Physics B（2015）

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