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Laser Damage Resistant Ta2O5/HfO2/SiO2 Multilayer Mirrors by Ion Beam Sputtering

D. Schiltz,Dinesh Patel,Luke A. Emmert,Cory Baumgarten,Brendan A. Reagan,Wolfgang Rudolph,Jorge J. Rocca,Carmen S. Menoni

Novel Optical Materials and Applications（2015）

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Abstract
We show the threshold fluence for damage of Ta2O5/SiO2 multilayer interference coatings measured using 0.19 ns and 4 ns pulses with λ=1.03 µm can be increased by 2x when modifying the coating’s top layer design.
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ta2o5/hfo2/sio2 multilayer mirrors,resistant ta2o5/hfo2/sio2,ion beam sputtering,laser damage
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