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原子層堆積法で成長させた酸化アルミ/酸化チタンのナノ積層体:成長と機械的性質

M E Ylivaara Oili,Kilpi Lauri,Liu Xuwen,Sintonen Sakari,Ali Saima,Laitinen Mikko,Julin Jaakko,Haimi Eero,Sajavaara Timo,Lipsanen Harri,Hannula Simo-Pekka,Ronkainen Helena,L Puurunen Riikka

Journal of Vacuum Science and Technology（2017）

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