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Expansion and Contraction of Single Shockley Stacking Faults in 4H-SiC Epitaxial Layer under Ultraviolet Irradiation

Takanori Tanaka,Hiromu Shiomi,Naoyuki Kawabata,Yoshiyuki Yonezawa,Tomohisa Kato,Hajime Okumura

The Japan Society of Applied Physics（2017）

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Key words
single shockley stacking faults,ultraviolet irradiation,h-sic
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