Development of Hollow Cathode Cell for Sputtering of Metal Samples from Electrodes

Daisuke Ishikawa,Yuta Yamamoto,Fumiko Yoshida,Yoshihiro Iwata,Shuichi Hasegawa

Imaging and Applied Optics 2018 (3D, AO, AIO, COSI, DH, IS, LACSEA, LS&C, MATH, pcAOP) (2018), paper LW3C.7（2018）

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摘要

A hollow cathode glow discharge plasma cell has been developed to vaporize samples placed on electrodes. We have shown possibility to apply this system to gases, liquid residues, and solid metals for nuclear engineering waste.

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关键词

hollow cathode cell,electrodes,metal samples,sputtering

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