AlGaN/GaN/Al_xGa_1-xN二重ヘテロ接合高電子移動度トランジスタ構造の構造と電気特性に及ぼすAl_xGa_1-xNバッファ層の影響【JST・京大機械翻訳】

Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena(2020)

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