Improved Kalman Filter for MEMS Thermal Mass Flowmeter

According to the characteristics of MEMS thermal mass flowmeter, an improved Kalman filter algorithm considering the flow variation is proposed in this paper. Firstly, the output signal of MEMS thermal mass flow meter is analyzed. Then, the condition and method of forced updating of Kalman state with the change of flow rate are proposed. The simulations and experiment of the proposed method are carried out. Compared with the Standard Kalman filtering algorithm, the response time and the measurement accuracy of the MEMS thermal mass flowmeter with the proposed method has been improved, which provide the new idea for the data processing of MEMS device.