QWI based on group V inter-diffusion for SOA photonic integration

Jing-Ya Chiu,Yang-Jeng Chen,Bo-Hong Chen,Yen-Hsiang Chang, C.Y. Chen,Rih-You Chen,Yi-Jen Chiu

ieee photonics conference（2021）

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摘要

Local group V atom inter-diffusion in InGaAsP quantum wells was used for quantum well intermixing (QWI), enabling low-temperature bandgap engineering in selected area. Controllable QWI was confirmed through PL and TEM, leading to highperformance integrated functions of 14 dB gain in SOA and 20 nm/V QCSE.

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关键词

IFVD,QWI,group III,group V,SOA

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