Research on High Power Ultrasonic Power Supply Based on Cascaded 9 Level Technology

Abstract In view of the low output power and high power density of ultrasonic power supply, a high power ultrasonic power supply based on 9-level inverter technology is proposed. The inverter of the power supply consists of two H-bridge units cascaded to form a 9-level converter, which outputs the 9-level voltage waveform, which can significantly improve the output power of the ultrasonic power supply, reduce the inductance of the matching network, and reduce the power density of the ultrasonic wave. The phase difference method based on PI control is used to track the resonance frequency. By analyzing the system structure, working principle and control strategy of the ultrasonic power supply, modeling and simulation were conducted on Matlab/Simulink to verify the feasibility and effectiveness of the scheme.