Search
ChatPaper
AI Writing
analysis
Analysis
编组
Open Data
more
More
RankingsMust ReadingJournal&ConferenceAI TRAI HistoryMaster Reading TreeXiaomai's Star TalentsTrajectoryTalentNDI TrackerOpenAI sign Language
VIPCreated with Sketch.

UV Broadband Antireflection Coating Using Al2O3, HfO2 and SiO2 Multilayer by Atomic Layer Deposition

Qing-Yuan Cai,Ling-Shan Gao,Hai-Han Luo,Cong Rui,Dingquan Liu

Optical Interference Coatings Conference (OIC) 2019 (2019), paper FB.5（2019）

Cited 0|Views4
No score
Abstract
UV broadband antireflection film M2HL in 250~390 nm spectral range was prepared by ALD using HfO2 as H layer. Higher transmittance was acquired when HfO2-Al2O3 nano-laminate replaced of HfO2 in the AR coating.
More
Translated text
Key words
uv broadband antireflection coating,sio2 multilayer,atomic multilayer
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined