Frequency-quadrupled Nd-doped fiber laser source in the deep-UV at 226 nm

Kilian Le Corre,Hervé Gilles,Sylvain Girard,Alexandre Barnini,Louanne Kervella,Pascal Guitton,Thierry Robin,Giorgio Santarelli,Mathieu Laroche

Laser Congress 2020 (ASSL, LAC) (2020), paper AF3A.5（2020）

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摘要

We present the first demonstration of a laser source at 226nm based on the frequency-quadrupling of an all-PM Nd-doped fiber laser. The DUV laser delivers 175mW of average power, 50ns pulse at 30kHz repetition rate.

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关键词

fiber laser source,frequency-quadrupled,nd-doped

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