Deep UV for materials processing based on the industrial TruMicro Series of ultrafast solid-state laser amplifiers

Ultrashort laser pulses in the deep ultraviolet (DUV) based on nonlinear-optical conversion of NIR solid state sources promise advantages for the machining of wide-bandgap materials such as compound semiconductors like indium / aluminum / gallium nitride (InAlGaN, AlN, GaN), silicon carbide (SiC), zinc sulfide (ZnS), or boron nitride (BN). We present systems providing few-picosecond pulses at 257.5 nm with high average power exceeding 20 W of DUV obtained by frequency quadrupling of our proven TruMicro Series of industrial ultrafast amplifiers. High beam quality and decent lifetime of the DUV optics are demonstrated.