Applicability simulations of inverted plasmonic lenses

To precisely characterize nanostructures while keeping the advantages of optical measurements, modern methods are still being refined. Plasmonic lenses, which are designable with less computational effort than dielectric metalenses, are promising. Simulations showed that sub-wavelength sized focal spots in arbitrary distances are achievable. We describe our simulations of the lens-sample interaction with plasmonic lenses with working distances up to 1 mm combined with single and periodic nanostructures using finite element method. Scanning the focal spot over the sample, we examine transmission and reflection in the far field, the field-structure interaction in the near field, and the applicability in Mueller ellipsometry.