Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method

We describe a dynamic spectral ellipsometric Direct filtering phase extraction method based on a monolithic polarizing Michelson interferometry scheme. The proposed dynamic phase extraction method is three times faster and it can evaluate a spectrally resolved ellipsometric phase Δ(k) with utmost the same level of precision and accuracy compared to Fourier Transform method. The performance of the proposed dynamic spectral ellipsometric phase extraction method is demonstrated by using a SiO2 thin film with a nominal thickness of 500 nm deposited on Si bare wafer.