Combined focused ion beam and secondary ion mass spectrometry for high resolution light element detection applied on Li-Ion batteries

Microscopy and Microanalysis(2021)

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摘要
Gudrun Wilhelm, Ute Golla-Schindler, Katharina Wöhrl, Christian Geisbauer, Graham Cooke, Timo Bernthaler and Gerhard Schneider 1. Materials Research Institute (IMFAA), Aalen University, Aalen, Germany, Aalen, Baden-Wurttemberg, Germany, 1. Materials Research Institute (IMFAA), Aalen University, Aalen, Germany, Aalen, Germany, 1. Abteilung ZAF/CARISSMA, Technische Hochschule Ingolstadt, Ingolstadt, Germany, Ingolstadt, Bayern, Germany, 1. Abteilung ZAF/Carissima, Technische Hochschule Ingolstadt, Ingolstadt, Germany, Aalen, Bayern, Germany, Hiden Analytical GmbH, Düsseldorf, Germany, Germany, 1. Materials Research Institute (IMFAA), Aalen University, Aalen, Germany, United States
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关键词
secondary ion mass spectrometry,light element detection,combined focused ion beam,mass spectrometry,li-ion
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