Laser processing of polymeric materials by quantum cascade lasers (Conference Presentation)

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV(2020)

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摘要
Laser processing of polymeric materials by means of 100-mW class QCL lasers with emission wavelength of 7.728 and 4.329 μm were examined. Polymeric materials show absorption bands based on transitions between vibronic levels in mid-infrared (MIR) wavelength. Since such absorption bands are very sharp, resonant conditions with laser wavelength are critical. Quantum cascade laser (QCL) is a promising laser source for mid-infrared laser processing; emission wavelength can be customized by changing the heterostructure. In this work, we have employed 100-mW class QCLs and applied for focused irradiation at several polymeric materials, polypropylene (PP), polycarbonate (PC), polyacetal (POM).
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