Exploring 3D architectures and superconducting interconnects using highly conformal ALD and CVD: a BEOL-compatible process for superconducting MgB 2David J. Mandia,Devika Choudhury, Neil Anderson, Gregory S. Girolami,Jeffrey W. Elam, Ali Nassiri,Angel Yanguas-GilBulletin of the American Physical Society（2020）引用 0|浏览6暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
