TEUS: high-brightness EUV LPP light source based on fast rotating target: product overview and specifications

We present performance metrics for the commercially available TEUS product line. TEUS-S is a high-brightness EUV LPP light source based on a fast rotating liquid metal target with EUV collection angle of 0.05sr. The TEUS-S100 and S400 models employing 100W and 400W of average laser power respectively have been characterized wi0th particular attention to the collector optics lifetime. It is estimated that 10% mirror reflectivity degradation will occur after 2 years for the TEUS-S100 and after 0.5 year for the TEUS-S400 in 24/7operation mode. The TEUS-S400 source provides more than 30 mW of in-band (±1%) EUV radiation after the debris mitigation system.