Structure and Surface Properties of Magnetron Sputtered Tantalum Oxynitride Coatings for Biomedical Applications

Antimicrobial properties and thrombotic resistance of modern biomaterials depend on the composition and surface properties, such as roughness, topography and wettability. Tantalum oxynitrides demonstrate a wide range of modifications in the structure and elemental composition. Results show the effect of deposition conditions on the structure and surface properties of tantalum oxynitrides and further correlation with the biological response of TaON films in vitro tests.