Microring Modulators in a New Silicon Photonics-Optimized 45 nm Monolithic Electronics-Photonics SOI CMOS Platform

Kenaish Al Qubaisi,Anatol Khilo,Hayk Gevorgyan,Milos A. Popovic

conference on lasers and electro optics（2021）

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摘要

We report on microring modulators in the new 45CLO photonics-optimized 45 nm electronic-photonic CMOS platform. Interdigitated disk and vertical-junction rib microring designs are demonstrated, with 20 GHz bandwidth at 25 Gbps data rate.

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关键词

microring modulators,45CLO photonics-optimized 45 nm electronic-photonic CMOS platform,vertical-junction rib microring designs,silicon photonics-optimized monolithic electronics-photonics SOI CMOS platform,size 45.0 nm,frequency 20.0 GHz,Si

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