A general stress patterning method for manufacturing ultra-precise free-form deformation in thin-substrates (Conference Presentation) (Withdrawal Notice)
Optics for EUV, X-Ray, and Gamma-Ray Astronomy X(2021)
摘要
Publisher’s Note: This conference presentation, originally published on 5 August 2021 was withdrawn on 13 August 2021 per author request.
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关键词
deformation,manufacturing,general stress,ultra-precise,free-form,thin-substrates
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