Fabrication and evaluation of tapered superconducting TSV for STJ array detector Ryo Ishizuka,Masahiro Aoyagi,Satoru Mima,Chiko Otani,Masato Naruse,Hiroaki Myoren,Tohru TainoThe Japan Society of Applied Physics(2020)引用 0|浏览0暂无评分关键词superconducting,tsvAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要