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Increasing the laser induced damage resistance of ultraviolet antireflective coatings by mitigation of damage precursors

Thimotheus Alig,Nils Bartels,Paul Allenspacher,Istvan Balasa,Tammo Böntgen,Detlev Ristau,Lars Jensen

Laser Congress 2020 (ASSL, LAC) (2020), paper AW1A.6（2020）

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Abstract
We demonstrate the mitigation of nano-sized damage precursors during the manufacturing of IBS-coatings using bombardment with a secondary ion source and laser conditioning with a nanosecond-pulsed laser. Optical coatings show a significantly increased damage threshold.
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Antireflective Coatings
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