Outgassing of Electron Beam Printed Copper

IVEC 2021: 2021 22ND INTERNATIONAL VACUUM ELECTRONICS CONFERENCE(2021)

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摘要
Electron beam printing, or additive manufacturing, of oxygen-free high conductivity copper has demonstrated significant potential for utilization in vacuum electronic devices and their sub-components. Pioneering vacuum electronics community has influenced the additive manufacturing community to develop platforms and processes for printing copper and its alloys. Following demonstrations of ultra-high vacuum hermeticity and measurements of RF losses, evaluation of outgassing of additively manufactured X-band waveguides has been performed. Preliminary results reveal suitable outgassing rates for implementation in ultra-high vacuum systems.
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关键词
Additive manufacturing,Oxygen-free high conductivity copper,Electron beam printing
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