Dynamic spectroscopic imaging ellipsometry

A dynamic spectroscopic imaging ellipsometer (DSIE) employing a monolithic polarizing interferometer is described. The proposed DSIE system can provide spatio-spectral ellipsometric phase map data Delta(lambda, x) dynamically at a speed of 30Hz. We demonstrate the ultrafast mapping capability of the spectroscopic ellipsometer by measuring a patterned 8-inch full wafer with a spatial resolution of less than 50 x 50 mu m(2) in an hour. (C) 2022 Optica Publishing Group