22 nm FD-SOI MOSFET Figures of Merit at high temperatures upto 175 °C

2022 IEEE 22nd Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF)(2022)

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摘要
This work studies the impact of increase in temperature on the RF and analog figures of merit (FoMs) of 22 nm FD-SOI MOSFETs from room temperature of $25^{\circ}C$ to $175^{\circ}C$. DC and RF measurements are performed on the MOSFETs to extract the main RF FoMs over temperature. From DC measurements in temperature, the zero-temperature coefficient (ZTC) point and threshold voltage (VTh...
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关键词
Temperature measurement,Radio frequency,Degradation,MOSFET,Temperature distribution,Atmospheric measurements,Current measurement
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