Proof-of-concept study of the virtual optical scale bar by the pulse-to-pulse interferometry

OPTICS EXPRESS(2022)

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摘要
The optical scale bar with calibrated or measured internal point-to-point length has many applications in coordinate measurements. In this paper, the virtual optical scale bar with two retroreflectors is constructed by the absolute distance measurement based on pulse-to-pulse interferometry. The temporal and dispersive coherence could be utilized to determine the adjustable internal length of multiple pulse-to-pulse intervals with high precision. The proposed scheme was combined with a pellicle beamsplitter to minimize systematic error. The influence of its thickness on precision is also discussed and calibrated in detail. Besides, a femtosecond mode-locked pulse laser with 100-MHz repetition rates was employed in our system to develop an optical scale bar and verify the feasibility of the proposed method. The sub-micron precision could be realized by temporal coherence with a piezo-driven stage or a simplified non-polarized scheme of dispersed coherence. It shows that this method could achieve a flexible and high-precision virtual optical scale bar for further practical applications. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
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