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A Thermopile Infrared Sensor Array Pixel Monolithically Integrated with an NMOS Switch

Hongbo Li,Chenchen Zhang,Gaobo Xu,Xuefeng Ding,Yue Ni,Guidong Chen,Dapeng Chen, Na Zhou,Haiyang Mao

Micromachines（2022）

引用 3|浏览21
关键词
thermopile infrared sensor array (TISA) pixel,dual-layer p+/n- poly-Si,monolithic integration,interleaved MEMS and CMOS processing,NMOS switch
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