Design and Preparation of Self-Oscillating Actuators Using Piezoelectric Ceramics with High Coupling Factors and Mechanical Quality Factors

Piezoelectric material properties were optimized to develop materials for an ultrasonic vibrator targeting a high vibration efficiency. Herein, novel materials were developed using a composition represented by 0.08Pb(Ni1/3Nb2/3)O-3-0.07Pb(Mn1/3Nb2/3)O-3-0.85Pb(Zr0.5Ti0.5)O-3 + 0.3 wt.% CuO + 0.3 wt.% Fe2O3 with 0.3 wt.% Sb2O3 doping. A ceramic shape with a thickness of 2 mm was optimized using finite element analysis software, and high values of coupling factors (0.54) and mechanical quality factors (1151) were obtained. This ceramic was used to fabricate a bio-beauty device (frequency = 1 MHz), and the manufactured ultrasonic vibrator indicated that the actuator oscillated with the maximum amplitude at a frequency of 1.06 MHz.