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Failure Analysis of Bit Line to SNC Leakage Fail in 2x Nm DRAM Using Nano-Probing Technique

Jaeho Won, Jundong Kim, Jina Kim, Jihye Shin, Jihoon Kim, Kyungrim Lee, Miae Yoon,Jonghak Lee,Jaeyoon Lee, Weonjoon Suh,Hyeonsoo Kim

International Symposium for Testing and Failure Analysis ISTFA 2014 Conference Proceedings from the 40th International Symposium for Testing and Failure Analysis(2014)

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