Contact Leakage Failure Analysis by EBIC, C-AFM and Nano-probing
International Symposium for Testing and Failure AnalysisISTFA 2019: Conference Proceedings from the 45th International Symposium for Testing and Failure Analysis(2019)
摘要
Abstract This research sets up failure analysis flow to verify failure mechanisms and root causes of different kinds of contact leakage. This flow mainly uses EBIC, C-AFM and nano-probing to do fault isolation and confirm electrical failure mechanisms. Appropriate sample preparation is also mandatory for FIB, SEM and TEM inspection.
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关键词
ebic,c-afm,nano-probing
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