Contact Leakage Failure Analysis by EBIC, C-AFM and Nano-probing

Kuang-Tse Ho, Chien-Wei Wu,Te-Fu Chang,Chia-Hsiang Yen, Ching-Hsiang Chan

International Symposium for Testing and Failure AnalysisISTFA 2019: Conference Proceedings from the 45th International Symposium for Testing and Failure Analysis（2019）

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摘要

Abstract This research sets up failure analysis flow to verify failure mechanisms and root causes of different kinds of contact leakage. This flow mainly uses EBIC, C-AFM and nano-probing to do fault isolation and confirm electrical failure mechanisms. Appropriate sample preparation is also mandatory for FIB, SEM and TEM inspection.

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ebic,c-afm,nano-probing

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