Technologies of microsystem technique and nanosensorics

IOP Conference Series: Materials Science and Engineering(2020)

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Abstract
Abstract Present article deals with microsystem technology and nanosensors. We covered the properties and synthesis technology of Carbon Nanomaterials. The detailed discussion has been made on synthesis of Carbon Nanotubes by thermal chemical vapour deposition (CVD) while reduced graphene oxide by modified Hummers method. Further, as grown Carbon nanomaterials have been used for developing optical detector for visible to near infrared range and Nitrogen Dioxide gas sensor.
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microsystem technique
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