Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification
Dalton Transactions（2021）
Abstract
Alucones are one of the best-known films in the Molecular Layer Deposition (MLD) field. In this work, we prove that alucone/Al2O3 nanolaminate synthesis can be successfully performed by alternating alucone MLD growth with static O2 plasma exposures.
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Key words
plasma densification,molecular layer,alucone
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