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9‐3: Advanced Process and Structure of Backplane for Micro LED Display

Hua-fei Xie,Xue-ru Mei,Ma-cai Lu,Ming-gang Liu,Nian Liu,Lei Wen,Si-jia Wu, Yong Fan,Shu-jhih Chen,Chia-yu Lee,Sheng-dong Zhang,Xin Zhang

SID Symposium Digest of Technical Papers（2020）

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Abstract
Five process improvements for protecting the Micro LED display from HTHHO were evaluated by measuring the Vth shift of top‐gate IGZO TFT backplane. The results showed that the Vth value of Micro LED backplane was placed at HTHHO (60 °C, 90% RH) for 1000h drifted less than 1.5V after protected by the inorganic/ organic film of TF‐1/TF‐2.
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Key words
backplane,micro
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