Effect of scaling on the performance of NEMS devices in switching applications

This paper discusses the effect of technology scaling in the performance of electrical parameters of NEMS (Nano Electro Mechanical Switch) devices in switching applications. This has been done by modeling a typical Cantilever NEMS with fixed dimensions using Matlab simulation tool and then varying its beam parameters to characterize the effect on pull in voltage. The reference model of 65 nm technology provides a pull in voltage of 0.9 V. This paper examines the possibility of minimization of beam dimensions, simultaneous effects on electrical parameters of the beam and range of mechanical delay that can be afforded to improve the switching performance. Physical structure of Cantilever and Suspended NEMS have been created using Coventorware Simulation tool. Mathematical model ensures fast switching with technology scaling whereas Coventorware implementation proves the possibility of minimization of pull in without considering the ratio of dimensions.