3 μm a‐Si TFT Technology for High‐Performance and Cost‐Effective Liquid Crystal Displays
SID Symposium Digest of Technical Papers(2020)
Abstract
Herein, we successfully demonstrate the implement of 3µm channel length of a‐Si TFT process on 55” LCD panels, which facilitates to remarkably reduce the thickness of gate insulator and metal and the manufacture time without sacrificing the display quality, leading to the well balance between “low‐cost” and “high image quality”.
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Key words
crystal
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