Investigation of coherency stress-induced phase separation in AlN/AlxGa1−xN superlattices grown on sapphire substrates
CrystEngComm(2020)
Abstract
Suppression of compositional non-uniformity in AlxGa1−xN layers by using AlN/AlxGa1−xN superlattices through adjusting stresses in AlN/AlxGa1−xN layers is demonstrated.
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