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Hybrid Integration of Microwave Circuit Solenoid Inductors and AlGaN/GaN HEMTs Using an SU-8 Photosensitive Epoxy Interposer Layer

Robert C. Fitch,Marian Kazimierczuk,James Gillespie,Aji Mattamana,Pompei Orlando,Kari Groves,Tony Quach

ECS Meeting Abstracts（2010）

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microwave circuit solenoid inductors,algan/gan hemts
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