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Formation of Through-Chip Porous Noble Metal Layers on Silicon Substrates

Taku Matsuzaka,Junichi Shimanuki, Takashi Ishiguro, Masanori Hayase

ECS Meeting Abstracts(2009)

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Key words
Nanoporous Metals,Nanoporous Membranes,Porous Alumina,Nanoparticle Assembly,Nanostructures
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