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Heteroepitaxial Growth of 3C-SiC(111)on Si(110) Substrate Using Monomethylsilane

Atsushi Konno,Yuzuru Narita,Takashi Itoh,Kanji Yasui,Hideki Nakzawa,Tetsuo Endoh,Maki Suemitsu

ECS Meeting Abstracts（2006）

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heteroepitaxial growth,monomethylsilane,c-sic
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