New Materials, Processes and Device Structures for 65nm CMOS Technology Node and Beyond
Bich-Yen Nguyen,Aaron Thean,Da Zhang,Ted White,Mariam Sadaka,Dina Triyoso, Jamie Schaeffer,Brian Goolsby, Thien Nguyen,Veer Dhandapani,Victor Vartanian, Linda McCormick,David Theodore,Stefan Zollner, Qianghau Xie,Xiang-Dong Wang,Zhanghai Shi,Leo Mathew, Melissa Zavala, Colita Parker, Heather Collard,Jill Hildreth, Lata Prabhu, Raghaw Rai, Sharon Murphy, Patrick Montgomery,Sriram Kalpat,Michael Ramon,David Gilmer,Bill Taylor,Alex Demkov,Vance Adams,Jack Jiang, Jian Chen,Cheng-Hung Chang,Vidya Kaushik, Luna Chandna, Mike Sadd,Alex Barr,Anne Vandooren,Daniel Pham, Mike Mendicino, Jon Cheek, Hsing Tseng,Bruce White,Phil Tobin,Marius Orlowski,Suresh Venkatesan,Venkat Kolagunta, Joe Mogab,M. Canonico,M. Kottke ECS Meeting Abstracts（2006）
Abstract
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Key words
cmos,device structures,new materials
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