Влияние барьерных слоев бериллия на свойства многослойных зеркал Mo/Si

С.Ю. Зуев, Р.С. Плешков, В.Н. Полковников, Н.Н. Салащенко, М.В. Свечников,Н.И. Чхало,F. Schafers,M.G. Sertsu, A. Sokolov

Журнал технической физики（2019）

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摘要

The results of studies of multilayer Mo/Si mirrors with interlayer layers of B4C and Be in the vicinity of a wavelength of 13.5 nm are presented. It is shown that a four-component multilayer mirror of the Mo/Be/Si/B4C type exceeds the Mo/Si mirror by 2% and the Mo/Si/B4C mirror by 1.3%. This mirror also provides the highest spectral bandwidth at half-height (Δλ1/2 = 0.535 nm). An explanation of these effects is given.

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