Area-selective Cu Film Growth on TiN and SiO<sub>2</sub> by Supercritical Fluid Deposition
IEEJ Transactions on Sensors and Micromachines(2020)
AI Read Science
Must-Reading Tree
Example
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined