Solid-Phase Epitaxy of Perovskite High Dielectric PrAlO₃ Films Grown by Atomic Layer Deposition for Use in Two-Dimensional Electronics and Memory Devices

ACS Applied Nano Materials（2019）

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Solid-Phase Epitaxy of Perovskite High Dielectric PrAlO3 Films Grown by Atomic Layer Deposition for Use in Two-Dimensional Electronics and Memory Devices