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High Substitutional-Sn-Concentration GeSn-on-Insulator by Weak-Laser-Irradiation-Enhanced Solid-Phase Crystallization at Low-Temperature (~170°C)

T. Sugino,K. Moto,R. Matsumura,H. Ikenoue,M. Miyao,T. Sadoh

Extended Abstracts of the 2017 International Conference on Solid State Devices and Materials（2017）

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Abstract
2017 International Conference on Solid State Devices and Materials,High Substitutional-Sn-Concentration GeSn-on-Insulator by Weak-Laser-Irradiation-Enhanced Solid-Phase Crystallization at Low-Temperature (~170°C)
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substitutional-sn-concentration,gesn-on-insulator,weak-laser-irradiation-enhanced,solid-phase,low-temperature
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