Surface energy engineering for LiTaO3and α-quartz SiO2for low temperature (<220 °C) wafer bondingBrian Baker,Nicole Herbots,Shawn D. Whaley,Mohammed Sahal,Jacob Kintz,Aliya Yano,Saaketh Narayan,Alex L. Brimhall,Wey-Lyn Lee,Yuko Akabane,Robert J. CulbertsonJournal of Vacuum Science & Technology A(2019)引用 5|浏览0暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要