Feasibility Study of Graphite MEMS
The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)（2018）
Abstract
We aimed to develop graphite-based microelectromechanical system (MEMS). We tried building vibrator using HOPG sheet and highly accurate graphite sheet. We confirmed the performance by measuring resonance frequency.
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Key words
graphite,feasibility study
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